TRIMETHYLALUMINIUM Meaning and
Definition
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Trimethylaluminium is a chemical compound with the molecular formula Al(CH3)3. It belongs to the class of organoaluminium compounds and is commonly known as TMA. It consists of a central aluminium atom bonded to three methyl groups. This compound appears as a colorless to pale yellow liquid with a pungent and fruity odor.
Trimethylaluminium is primarily used as a precursor in the production of semiconductors, specifically in the metal-organic chemical vapor deposition (MOCVD) process. MOCVD is a technique employed for the growth of high-quality thin films that are crucial for the fabrication of electronic and optical devices. TMA acts as a source of aluminium in this process and is vaporized and decomposed to form a thin aluminium oxide layer.
However, trimethylaluminium is known to be highly reactive and pyrophoric, meaning it easily ignites upon exposure to air. Therefore, it requires careful handling under controlled conditions, such as being stored in air-tight containers or using specialized equipment. Safety precautions, including the use of appropriate protective clothing and ensuring good ventilation, are imperative when working with this compound.
In summary, trimethylaluminium is a chemical compound essential in the production of semiconductors, particularly in the MOCVD process. It is a colorless to pale yellow liquid that is highly reactive and needs to be handled with caution due to its pyrophoric nature.
Etymology of TRIMETHYLALUMINIUM
The word "trimethylaluminium" is derived from the chemical compound's composition and nomenclature. Here is a breakdown of its etymology:
1. Trimethyl: The prefix "tri-" signifies that there are three methyl groups (CH3-) present in the compound. "Methyl" refers to a single carbon atom bonded to three hydrogen atoms, forming the functional group -CH3.
2. Aluminium: The term "aluminium" is the standard English name for the chemical element with the atomic number 13. It originates from the Latin word "alumen", which means "bitter salt" or "alum".
Therefore, "trimethylaluminium" describes a compound that contains three methyl groups attached to an aluminium atom.
